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Silicon-on-sapphire metasurfaces generate arrays of dark and bright traps for neutral atoms

Chengyu Fang, Minjeong Kim, Hongyan Mei, Xuting Yang, Zhaoning Yu, Yuzhe Xiao, Sanket Deshpande, Preston Huft, Alan M. Dibos, David A. Czaplewski, Mark Saffman, Jennifer T. Choy, Mikhail A. Kats·January 3, 2026
physics.opticsphysics.app-phQuantum Physics

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Abstract

We demonstrated crystalline silicon-on-sapphire (c-SOS) metasurfaces that convert a Gaussian beam into arrays of complex optical traps, including arrays of optical bottle beams that trap atoms in dark regions interleaved with bright tweezer arrays. The high refractive index and indirect band gap of crystalline silicon makes it possible to design high-resolution near-infrared ($λ>700$ nm) metasurfaces that can be manufactured at scale using CMOS-compatible processes. Compared with active components like spatial light modulators (SLMs) that have become widely used to generate trap arrays, metasurfaces provide an indefinitely scalable number of pixels, enabling large arrays of complex traps in a very small form factor, as well as reduced dynamic noise. To design metasurfaces that can generate three-dimensional bottle beams to serve as dark traps, we modified the Gerchberg-Saxton algorithm to enforce complex-amplitude profiles at the focal plane of the metasurface and to optimize the uniformity of the traps across the array. We fabricated and measured c-SOS metasurfaces that convert a Gaussian laser beam into arrays of bright traps, dark traps, and interleaved bright/dark traps.

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